[IEEE 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) - Grenoble (2012.09.24-2012.09.26)] 2012 International Semiconductor Conference Dresden-Grenoble (ISCDG) - Large-Scale Facilities for R&D on micro- and nanotechnologies: Neutrons and synchrotron X-rays for advanced electronics characterisation
Beaucour, J., Mitchell, E., Bordet, P., Chabli, A., Stirling, W.Year:
2012
Language:
english
DOI:
10.1109/iscdg.2012.6360013
File:
PDF, 105 KB
english, 2012