Magnetic design of a cathodic arc and sputtering polyvalent...

IEEE Transactions on Magnetics 1994 / Nov. Vol. 30; Iss. 6

Magnetic design of a cathodic arc and sputtering polyvalent source for vapour deposition

Heras, N., Torrado, A., Barandiaran, J.M., Goikoetxea, J.
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Volume:
30
Language:
english
Journal:
IEEE Transactions on Magnetics
DOI:
10.1109/20.334189
Date:
January, 1994
File:
PDF, 292 KB
english, 1994
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