[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - 65nm poly gate etch challenges and solutions
Yi Huang,, Shan-Shan Du,, Hai-Yang Zhang,, Hai-Hua Chen,, Qiu-Hua Han,, Shih-Mou Chang,Year:
2008
Language:
english
DOI:
10.1109/icsict.2008.4734745
File:
PDF, 4.36 MB
english, 2008