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[IEEE International Electron Devices Meeting 1999. Technical Digest - Washington, DC, USA (5-8 Dec. 1999)] International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) - A two-dimensional low pass filter model for die-level topography variation resulting from chemical mechanical polishing of ILD films
Tat-Kwan Yu,, Chheda, S., Ko, J., Roberton, M., Dengi, A., Travis, E.Year:
1999
Language:
english
DOI:
10.1109/iedm.1999.824296
File:
PDF, 433 KB
english, 1999