[IEEE International Electron Devices Meeting 1999....

[IEEE International Electron Devices Meeting 1999. Technical Digest - Washington, DC, USA (5-8 Dec. 1999)] International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318) - A two-dimensional low pass filter model for die-level topography variation resulting from chemical mechanical polishing of ILD films

Tat-Kwan Yu,, Chheda, S., Ko, J., Roberton, M., Dengi, A., Travis, E.

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Year:

1999

Language:

english

DOI:

10.1109/iedm.1999.824296

File:

PDF, 433 KB

english, 1999

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