[IEEE CAS 2001 International Semiconductor Conference - Sinaia, Romania (9-13 Oct. 2001)] 2001 International Semiconductor Conference. CAS 2001 Proceedings (Cat. No.01TH8547) - Rod-type microelectromechanical sensor
Efremov, G.I., Mukhurov, N.I.Year:
2001
Language:
english
DOI:
10.1109/smicnd.2001.967484
File:
PDF, 267 KB
english, 2001