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Spurious Resonance Suppression in Gigahertz-Range ZnO Thin-Film Bulk Acoustic Wave Resonators by the Boundary Frame Method: Modeling and Experiment
Pensala, T., Ylilammi, M.Volume:
56
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2009.1238
Date:
August, 2009
File:
PDF, 1.85 MB
english, 2009