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Polymer Cleaning From Porous Low-$k$ Dielectrics in $\hbox{He/H}_{2}$ Plasmas
Shoeb, Juline, Kushner, Mark J.Volume:
39
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2011.2152862
Date:
November, 2011
File:
PDF, 328 KB
english, 2011