Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2007 Vol. 25; Iss. 6
Imaging with surface sensitive backscattered electrons
Luo, T., Khursheed, A.Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2781523
File:
PDF, 501 KB
english, 2007