Imaging with surface sensitive backscattered electrons

Imaging with surface sensitive backscattered electrons

Luo, T., Khursheed, A.
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Volume:
25
Year:
2007
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.2781523
File:
PDF, 501 KB
english, 2007
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