![](/img/cover-not-exists.png)
[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - An all optical shock sensor based on buckled doubly-clamped silicon beam
Dong, B., Huang, J. G., Cai, H., Kropelnicki, P., Randles, A. B., Gu, Y. D., Liu, A. Q.Year:
2014
Language:
english
DOI:
10.1109/memsys.2014.6765735
File:
PDF, 1.38 MB
english, 2014