[IEEE 2007 International Conference on Perspective Technologies and Methods in MEMS Design - Lviv, Ukraine (2007.05.23-2007.05.26)] 2007 International Conference on Perspective Technologies and Methods in MEMS Design - The Development of Model for Parameters for MEMS Operating Reliability Determination
Melnyk, Mykhaylo, Teslyuk, Vasyl, Farmaha, Ihor, Karkulyovskyy, Volodymyr, Moroz, SvitlanaYear:
2007
Language:
english
DOI:
10.1109/memstech.2007.4283445
File:
PDF, 307 KB
english, 2007