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[IEEE 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Xian, China (2012.10.29-2012.11.1)] 2012 IEEE 11th International Conference on Solid-State and Integrated Circuit Technology - The influence of silicide technique on the device performance for deep sub-micro pMOSFETs
Liao, Yi-Ming, Ji, Xiao-Li, Chang, Jian-Guang, Wu, Chun-Bo, Yan, Feng, Shi, YiYear:
2012
Language:
english
DOI:
10.1109/icsict.2012.6467833
File:
PDF, 416 KB
english, 2012