[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - Chemically Amplified Molecular Resists for E-Beam Lithography
Manyam, J., Gibbons, F.P., Diegoli, S., Manickam, M., Preece, J.A., Palmer, R.E., Robinson, A.P.G.Year:
2007
Language:
english
DOI:
10.1109/imnc.2007.4456338
File:
PDF, 767 KB
english, 2007