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[IEEE International Electron Devices Meeting. Technical Digest - San Francisco, CA, USA (8-11 Dec. 1996)] International Electron Devices Meeting. Technical Digest - Electrical characterization of CVD TiN upper electrode for Ta/sub 2/O/sub 5/ capacitor
Myoung-Bum Lee,, Hyeon-Deok Lee,, Byung-Lyul Park,, U-In Chung,, Young-Bum Koh,, Moon-Yong Lee,Year:
1996
Language:
english
DOI:
10.1109/iedm.1996.554073
File:
PDF, 784 KB
english, 1996