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[IEEE IEEE International Solid-State Sensors and Actuators Conference - Boston, MA, USA (8-12 June 2003)] TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664) - Nonlinearities in single-crystal silicon micromechanical resonators
Kaajakari, V., Mattila, T., Kiihamaki, J., Kattelus, H., Oja, A., Seppa, H.Volume:
2
Year:
2003
Language:
english
DOI:
10.1109/sensor.2003.1217080
File:
PDF, 317 KB
english, 2003