[IEEE 2009 International Symposium on Micro-NanoMechatronics and Human Science (MHS) - Nagoya, Japan (2009.11.9-2009.11.11)] 2009 International Symposium on Micro-NanoMechatronics and Human Science - Development of the maskless photolithography device with an LCD-projector for fabrication of micropatterned surfaces
Itoga, Kazuyoshi, Kobayashi, Jun, Yamato, Masayuki, Okano, TeruoYear:
2009
Language:
english
DOI:
10.1109/mhs.2009.5351890
File:
PDF, 357 KB
english, 2009