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[IEEE 2006 IEEE International Conference on Semiconductor Electronics - Kuala Lumpur, Malaysia (2006.10.29-2006.12.1)] 2006 IEEE International Conference on Semiconductor Electronics - Study on Alignment Capability and Overlay Performance in 130nm BEOL Lithography Process
Yen, Lau Siau, Said, Suhana Mohd, Soin, Norhayati, Ibrahim, Kader, Sang, Ko BongYear:
2006
Language:
english
DOI:
10.1109/smelec.2006.380703
File:
PDF, 2.42 MB
english, 2006