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[IEEE 2014 American Control Conference - ACC 2014 - Portland, OR, USA (2014.6.4-2014.6.6)] 2014 American Control Conference - Design and control of 6-DOF high-precision scan stage with gravity canceller
Ohnishi, Wataru, Fujimoto, Hiroshi, Sakata, Koichi, Suzuki, Kazuhiro, Saiki, KazuakiYear:
2014
Language:
english
DOI:
10.1109/acc.2014.6859023
File:
PDF, 1.24 MB
english, 2014