Making porous conductive carbon films with unbalanced magnetron sputtering
Kim, Sung Il, Sahu, Bibhuti Bhusan, Weon, Byung Mook, Han, Jeon Geon, Koskinen, Jari, Franssila, SamiVolume:
54
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/jjap.54.010304
Date:
January, 2015
File:
PDF, 691 KB
english, 2015