[IEEE 2013 IEEE 40th International Conference on Plasma Sciences (ICOPS) - San Francisco, CA, USA (2013.06.16-2013.06.21)] 2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) - Characterization of a low-pressure VHF-CCP for sterilization pros and cons of a polymer discharge chamber
Fiebrandt, Marcel, Stapelmann, Katharina, Bibinov, Nikita, Awakowicz, PeterYear:
2013
Language:
english
DOI:
10.1109/plasma.2013.6634821
File:
PDF, 93 KB
english, 2013