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[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - CMOS-MEMS atomic force microscope
Sarkar, N., Mansour, R. R., Patange, O., Trainor, K.Year:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969836
File:
PDF, 1.14 MB
english, 2011