[IEEE 2008 IEEE Sensors - Lecce, Italy (2008.10.26-2008.10.29)] 2008 IEEE Sensors - Sputtered silicon antimony thin film for the infrared detection layer of microbolometer
Hojun Ryu,, Sang Hoon Cheon,, Seong Mok Cho,, Woo Seok Yang,, Byoung Gon Yu,, Chang Auck Choi,, Myung Lae Lee,, Se In Kwon,Year:
2008
Language:
english
DOI:
10.1109/icsens.2008.4716441
File:
PDF, 948 KB
english, 2008