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[IEEE 2010 IEEE International Electron Devices Meeting (IEDM) - San Francisco, CA, USA (2010.12.6-2010.12.8)] 2010 International Electron Devices Meeting - New observations of suppressed randomization in LER/LWR of Si nanowire transistors: Experiments and mechanism analysis
Runsheng Wang,, Tao Yu,, Ru Huang,, Yujie Ai,, Shuangshuang Pu,, Zhihua Hao,, Zhuge, Jing, Yangyuan Wang,Year:
2010
Language:
english
DOI:
10.1109/iedm.2010.5703478
File:
PDF, 674 KB
english, 2010