[IEEE 2013 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC) - Hong Kong, Hong Kong (2013.06.3-2013.06.5)] 2013 IEEE International Conference of Electron Devices and Solid-state Circuits - Optimal design of high-sensitivity pressure sensor with peninsula-structured diaphragm
Xian Huang,, Danqi Zhao,, Jun He,, Fang Yang,, Dacheng Zhang,Year:
2013
Language:
english
DOI:
10.1109/edssc.2013.6628228
File:
PDF, 1.37 MB
english, 2013