[IEEE 2013 Transducers & Eurosensors XXVII: The 17th...

[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Dual-beam, six-terminal nanoelectromechanical relays

Harrison, K. L., Lee, W. S., Shavezipur, K., Provine, J., Mitra, S., Wong, H.-S. P., Howe, R. T.

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Year:

2013

Language:

english

DOI:

10.1109/transducers.2013.6627049

File:

PDF, 2.16 MB

english, 2013

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