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[IEEE 2010 Silicon Nanoelectronics Workshop (SNW) - Honolulu, HI, USA (2010.06.13-2010.06.14)] 2010 Silicon Nanoelectronics Workshop - Enhanced hole mobility in non-(001) oriented sidewall corner of Si pMOSFETs formed on (001) substrate
Hsu, Chih-Yu, Chang, Hua-Gang, Kuang, Shin-Jiun, Lee, Wei-Han, Chen, Yu-Cheng, Lee, Chien-Chih, Chen, Ming-JerYear:
2010
Language:
english
DOI:
10.1109/snw.2010.5562565
File:
PDF, 709 KB
english, 2010