[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Micro accelerometer using screen printed BaTiO3 film on ceramic substrate
Suzuki, M., Kobayashi, Y., Aoyagi, S., Tajiri, H., Nagahata, T.Year:
2009
Language:
english
DOI:
10.1109/sensor.2009.5285912
File:
PDF, 2.64 MB
english, 2009