A Microcantilever Platform for Measuring Internal Friction in Thin Films Using Thermoelastic Damping for Calibration
Sosale, Guruprasad, Prabhakar, Sairam, Frechette, Luc G., Vengallatore, SrikarVolume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2140357
Date:
June, 2011
File:
PDF, 424 KB
english, 2011