Fabrication and characteristics of piezoelectric PZT cantilever for high speed atomic force microscopy
Nam, Hyo-Jin, Cho, Seong-Moon, Yee, Youngjoo, Lee, Heon-Min, Kim, Dong-Chun, Bu, Jong-Uk, Hong, JaewanVolume:
35
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580108016900
Date:
February, 2001
File:
PDF, 755 KB
english, 2001