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[IEEE Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005. - Kyoto, Japan (June 14-16, 2005)] Digest of Technical Papers. 2005 Symposium on VLSI Technology, 2005. - Hf-silicate inter-poly dielectric technology for sub 70nm body tied FinFET flash memory
Eun Suk Cho,, Choong-Ho Lee,, Tae-Yong Kim,, Suk-Kang Sung,, Byung Kyu Cho,, Chul Lee,, Hye Jin Cho,, Yonghan Roh,, Donggun Park,, Kinam Kim,, Byung-Il Ryu,Year:
2005
Language:
english
DOI:
10.1109/.2005.1469270
File:
PDF, 446 KB
english, 2005