[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - CMOS-MEMS transverse-mode square plate resonator with high Q and low motional impedance
Li, Ming-Huang, Chen, Wen-Chien, Li, Sheng-ShianYear:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969683
File:
PDF, 2.45 MB
english, 2011