![](/img/cover-not-exists.png)
[IEEE 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Shanghai, China (2006.10.23-2006.10.26)] 2006 8th International Conference on Solid-State and Integrated Circuit Technology Proceedings - Evaluation of phosphorous pile-up at the Si/SiO/sub 2/ interface
Seike, Aya, Sano, Itsutaku, Yamada, Keisaku, Ohdomari, IwaoYear:
2006
Language:
english
DOI:
10.1109/icsict.2006.306672
File:
PDF, 201 KB
english, 2006