[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Novel high growth rate processes for depositing poly-SiGe structural layers at CMOS compatible temperatures
Mehta, A., Gromova, M., Rusu, C., Olivier, R., Baert, K., Van Hoof, C., Witvrouw, A.Year:
2004
Language:
english
DOI:
10.1109/MEMS.2004.1290686
File:
PDF, 289 KB
english, 2004