Clean Process Mechanism of HKMG during N-PMOS Patterning

Solid State Phenomena 2012 / 12 Vol. 195

Clean Process Mechanism of HKMG during N-PMOS Patterning

Yeh, Autumn, Wang, Kai Ping, Wang, Zhi Jian, Chien, Chin Cheng, Guo, Ted, Chan, Michael, Yang, Chan Lon, Wu, Jun Yuan, Tan, Samantha S.H., Kabansky, Alex, Su, Tehtien, Kao, Jack
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Volume:
195
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/ssp.195.79
Date:
December, 2012
File:
PDF, 327 KB
english, 2012
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