Electrical Characteristics of the HfAlON Gate Dielectric With Interfacial UV-Ozone Oxide
Chen, Yung-Yu, Fu, Wen-Yu, Yeh, Ching-FaVolume:
29
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2007.911977
Date:
January, 2008
File:
PDF, 115 KB
english, 2008