[IEEE The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. - Baltimore, MD, USA (June 28-July 1, 2004)] The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. - Ta-based barrier layer improved by plasma immersion ion implantation
Jiang Suhua,, Fu, R., Chu, P., Zong Xiangfu,Year:
2004
Language:
english
DOI:
10.1109/plasma.2004.1339855
File:
PDF, 63 KB
english, 2004