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Semi-insulating silicon nitride (SinSiN) as a resistive field shield
Osenbach, J.W., Knolle, W.R.Volume:
37
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/16.106248
Date:
June, 1990
File:
PDF, 644 KB
english, 1990