[IEEE 19th IEEE International Conference on Micro Electro Mechanical Systems - Istanbul, Turkey (22-26 Jan. 2006)] 19th IEEE International Conference on Micro Electro Mechanical Systems - Channel-Select Micromechanical Filters Using High-K Dielectrically Transduced MEMS Resonators
Chandrahalim, H., Weinstein, D., Lih Feng Cheow,, Bhave, S.A.Year:
2006
Language:
english
DOI:
10.1109/memsys.2006.1627944
File:
PDF, 776 KB
english, 2006