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[IEEE 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Hualien, Taiwan (2007.08.12-2007.07.16)] 2007 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics - Optical NEMS Based Force Sensor Using Silicon Nanophotonics
Lee, Che, Radhakrishnan, Rohit, Chen, Chii-Chang, Li, Jing, Balasubramanian, NarayananYear:
2007
Language:
english
DOI:
10.1109/omems.2007.4373828
File:
PDF, 248 KB
english, 2007