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[IEEE Digest of Papers Microprocesses and Nanotechnology 2005. 2005 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (2005.10.25-2005.10.28)] Digest of Papers Microprocesses and Nanotechnology 2005 - Two-stage-driven cantilever-based RF MEMS micro-switch
Tauchi, H., Suzuki, K.Year:
2005
Language:
english
DOI:
10.1109/imnc.2005.203844
File:
PDF, 840 KB
english, 2005