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Errata to "High-cycle fatigue of single-crystal silicon thin films"
Muhlstein, C.L., Brown, S.B., Ritchie, R.O.Volume:
11
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2002.982868
Date:
February, 2002
File:
PDF, 12 KB
english, 2002