[IEEE 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT) - Shanghai, China (2010.11.1-2010.11.4)] 2010 10th IEEE International Conference on Solid-State and Integrated Circuit Technology - Computational analysis of GaAs/AlGaAs deposition in MOCVD vertical rotating disk reactor
Chen, Rui, Li, Jianjun, Ya, Xuan, Deng, Jun, Han, Jun, Luo, Shaojun, Gao, Lingchun, Shen, Guang-diYear:
2010
Language:
english
DOI:
10.1109/icsict.2010.5667717
File:
PDF, 381 KB
english, 2010