[IEEE 2014 IEEE Symposium on VLSI Technology - Honolulu, HI, USA (2014.6.9-2014.6.12)] 2014 Symposium on VLSI Technology (VLSI-Technology): Digest of Technical Papers - High-Q inductors on locally semi-insulated Si substrate by helium-3 bombardment for RF CMOS integrated circuits
Ning Li,, Okada, Kenichi, Inoue, Takeshi, Hirano, Takuichi, Qinghong Bu,, Narayanan, Aravind Tharayil, Siriburanon, Teerachot, Sakane, Hitoshi, Matsuzawa, AkiraYear:
2014
Language:
english
DOI:
10.1109/vlsit.2014.6894430
File:
PDF, 817 KB
english, 2014