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Formation of Tungsten Ohmic Contact on n-Type 6H-SiC by Pulsed Laser Processes
Nakashima, Koichi, Eryu, Osamu, Kume, T., Nakata, Toshitake, Inoue, M.Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/msf.264-268.779
File:
PDF, 348 KB
1998