[IEEE 2014 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Waikiki Beach, HI, USA (2014.4.13-2014.4.16)] The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Evaluation of Au/a-Si eutectic wafer level bonding process
Huang, Xian, He, Jun, Zhang, Li, Yang, Fang, Zhang, DachengYear:
2014
Language:
english
DOI:
10.1109/nems.2014.6908874
File:
PDF, 2.15 MB
english, 2014