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[IEEE 2009 IEEE 36th International Conference on Plasma Science (ICOPS) - San Diego, CA, USA (2009.06.1-2009.06.5)] 2009 IEEE International Conference on Plasma Science - Abstracts - EEDF analysis of CCP plasmas using regularized reconstruction analysis of IV characteristics from an RF compensated Langmuir probe
ElSaghir, A., Kennedy, C., Shannon, S., Pathak, B., Alexander, J., Nordheden, K.Year:
2009
Language:
english
DOI:
10.1109/plasma.2009.5227372
File:
PDF, 96 KB
english, 2009