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[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - An advantageous fabrication technology to integrate pressure sensor into multi-sensor for micro weather station
Pang, Cheng, Zhao, Zhan, Zhang, Jiangang, Shi, Li, Du, Lidong, Fang, Zhen, Liu, YonghongYear:
2009
Language:
english
DOI:
10.1109/nems.2009.5068575
File:
PDF, 4.59 MB
english, 2009