[IEEE 2010 International Conference on Microelectronic Test Structures (ICMTS) - Hiroshima, Japan (2010.03.22-2010.03.25)] 2010 International Conference on Microelectronic Test Structures (ICMTS) - Influence of metal coverage on transistor mismatch and variability in copper damascene based CMOS technologies
Wils, Nicole, Tuinhout, Hans, Meijer, MauriceYear:
2010
Language:
english
DOI:
10.1109/icmts.2010.5466825
File:
PDF, 150 KB
english, 2010