[IEEE 2009 International Semiconductor Device Research...

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[IEEE 2009 International Semiconductor Device Research Symposium (ISDRS 2009) - College Park, MD (2009.12.9-2009.12.11)] 2009 International Semiconductor Device Research Symposium - Sulfur implant for reducing nickel silicide contact resistance in FinFETs with silicon-carbon source/drain

Shao-Ming Koh,, Sinha, M., Yi Tong,, Hock-Chun Chin,, Wei-Wei Fang,, Xingui Zhang,, Chee-Mang Ng,, Samudra, G., Yee-Chia Yeo,
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Year:
2009
Language:
english
DOI:
10.1109/isdrs.2009.5378216
File:
PDF, 390 KB
english, 2009
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