[IEEE 2010 IEEE International Frequency Control Symposium (FCS) - Newport Beach, CA, USA (2010.06.1-2010.06.4)] 2010 IEEE International Frequency Control Symposium - Actuation and sensing integration challenges at the microscale: the Gordian Knot of the resonant bioMEMS realm
Nicu, Liviu, Alava, Thomas, Mathieu, Fabrice, Ayela, Cedric, Soyer, Caroline, Remiens, DenisYear:
2010
Language:
english
DOI:
10.1109/freq.2010.5556369
File:
PDF, 434 KB
english, 2010