Development of X-Shaped Filtered-Arc-Deposition (X-FAD)...

IEEE Transactions on Plasma Science 2007 / 08 Vol. 35; Iss. 4

Development of X-Shaped Filtered-Arc-Deposition (X-FAD) Apparatus and DLC/Cr Film Preparation

Tanoue, Hideto, Hikosaka, Hiroki, Iwasaki, Yasuhiro, Takikawa, Hirofumi, Sakakibara, Tateki, Hasegawa, Yushi
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Volume:
35
Language:
english
Journal:
IEEE Transactions on Plasma Science
DOI:
10.1109/tps.2007.896755
Date:
August, 2007
File:
PDF, 509 KB
english, 2007
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